Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
نویسندگان
چکیده
منابع مشابه
Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
Ordered nanoarchitectures have attracted an intense research interest recently because of their promising device applications. They are always fabricated by self-assembling building blocks such as nanowires, nanodots. This kind of bottom up approaches is limited in poor control over height, lateral resolution, aspect ratio, and patterning. Here, we break these limits and realize 3D sculpturing ...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2016
ISSN: 2045-2322
DOI: 10.1038/srep18886